最終更新日:2024/07/30

Acronym of ethyldimethylindium, the Liquid Indium Metalorganic precursor for MOCVD of Indium containing compound semiconductors. EDMIn was developed as a liquid alternative for commonly used solid trimethylindium (TMI) source. Following EDMIn, Di-isopropylmethylindium or DIPMeIn (US Patent 6,680,397) is developed as the next generation liquid indium MOCVD source to improve on the limitations of solid and solution TMI.

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EDMIn

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DiQt

DiQt(ディクト)

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